Exceptional accuracy and precision of our Wavefront Sensors

Veeco results vs. Optino results

SpotOptics Shack-Hartmann wavefront sensors results have been compared with results from the most popular interferometers : Zygo, Veeco, Fisba, 4D Technology

SpotOptics Optino vs. Zygo Interferometer

  • A small area (7mm) of a hard-disk platter was tested using
    the Zygo GPIxp HR (high resolution) interferometer
  • The same area was tested with our standard instrument Optino/SenSoft
  • A high quality lambda/20 flat mirror was used for the calibration
  • Both the tests were done in double pass at 632.8nm

Download document on Accuracy of SpotOptics Wavefront Sensors

 

 

Measured parameters

PARAMETER
Zygo GPIxp HR Optino Pro Difference
P-V (nm) 93.2 100.2 7
Rms (nm) 18.3 20.3 2
Defocus (nm) -23.2 -19.9 -3.3
P-V (waves) 0.1473 0.1596 0.011

Results

3D Surface plot from Zygo                              3D surface plot from Optino

 

SpotOptics Optino vs. Veeco Interferometer

  •  A small area (9mm) of a flat mirror was tested using a high
    resolution Veeco interferometer
  • The same area was tested with our standard instrument Optino/SenSoft mounting a cooled CCD camera
  • Both the tests were done at 632.8nm

Download document on Accuracy of SpotOptics Wavefront Sensors

Results

Veeco: PV 10nm, RMS 1nm                                   Optino: PV 14nm, RMS 2.1nm

The wavefront from Veeco (on left) and the wavefront as measured by Sensoft (right).
A clear correspondence between the two is seen.

Statistics of the wavefront from Veeco

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