
SpotOptics Shack-Hartmann wavefront sensors results have been compared with results from the most popular interferometers : Zygo, Veeco, Fisba, 4D Technology
SpotOptics Optino vs. Zygo Interferometer
- A small area (7mm) of a hard-disk platter was tested using
the Zygo GPIxp HR (high resolution) interferometer - The same area was tested with our standard instrument Optino/SenSoft
- A high quality lambda/20 flat mirror was used for the calibration
- Both the tests were done in double pass at 632.8nm
Download document on Accuracy of SpotOptics Wavefront Sensors
Measured parameters
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3D Surface plot from Zygo 3D surface plot from Optino![]() |
SpotOptics Optino vs. Veeco Interferometer
- A small area (9mm) of a flat mirror was tested using a high
resolution Veeco interferometer - The same area was tested with our standard instrument Optino/SenSoft mounting a cooled CCD camera
- Both the tests were done at 632.8nm
Download document on Accuracy of SpotOptics Wavefront Sensors
Contour of wavefront from Veeco Contour of wavefront from Optino |
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Veeco: PV 10nm, RMS 1nm Optino: PV 14nm, RMS 2.1nm
The wavefront from Veeco (on left) and the wavefront as measured by Sensoft (right). |
Statistics of the wavefront from Veeco