Our Wavefront Sensors vs. Interferometers

SpotOptics Shack-Hartmann wavefront sensors results have been compared with results from the most popular interferometers : Zygo, Veeco, Fisba, 4D Technology

SpotOptics Optino vs. Zygo Interferometer

 

  • A small area (7mm) of a hard-disk platter was tested using
    the Zygo GPI xp HR (high resolution) interferometer
  • The same area was tested with our standard instrument Optino/Sensoft
  • A high quality lambda/20 flat mirror was used for the calibration
  • Both the tests were done in double pass at 632.8nm

Download document on Accuracy of SpotOptics Wavefront Sensors

 

 

Measured parameters

PARAMETER
Zygo GPIxp HR Optino Pro Difference
P-V (nm) 93.2 100.2 7
Rms (nm) 18.3 20.3 2
Defocus (nm) -23.2 -19.9 -3.3
P-V (waves) 0.1473 0.1596 0.011

Results

3D Surface plot from Zygo                               3D surface plot from Optino

 

SpotOptics Optino vs. Veeco Interferometer

 

flat

  •  A small area (9mm) of a flat mirror was tested using a high
    resolution Veeco interferometer
  • The same area was tested with our standard instrument Optino/Sensoft mounting a cooled CCD camera
  • Both the tests were done at 632.8nm

Download document on Accuracy of SpotOptics Wavefront Sensors

Results

Veeco Optino_veecoscale
The wavefront from Veeco (on left) and the wavefront as measured by Sensoft (right).
A clear correspondence between the two is seen.
The P-V measured on the surface is 14nm with rms 2nm

 

 

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